Here are some examples:

Bavaria: "Digital Bonus Bavaria"
https://www.digitalbonus.bayern/

North Rhine-Westphalia: "SMEs Innovative & Digital"
https://www.wirtschaft.nrw/mittelstand-innovativ-und-digital

Lower Saxony: "Digital Bonus Lower Saxony Innovative"
https://digitalagentur-niedersachsen.de/digitalbonus-niedersachsen-innovativ/

Baden-Württemberg: "Digitalization Premium Plus"
https://www.wirtschaft-digital-bw.de/foerderprogramme/digitalisierungspraemie-plus

Saxony: "Digitalization Grant ERDF 2021 to 2027"

https://www.sab.sachsen.de/f%C3%B6rderrichtlinie-digitalisierung-zuschuss-efre-2021-bis-2027

Thuringia: "Digital Bonus Thuringia

https://www.aufbaubank.de/Foerderprogramme/Digitalbonus-Thueringen

We would be happy to assist you in selecting and finding other funding programs.